The Cleanroom Wiki: Terms and definitions

Transfer of infrared energy to the molecules present within the pathway of the radiation. (ECSS-Q-ST-70-05C, 2009)

A minienvironment that creates and maintains a controlled condition. (SEMI E44-96, Guide for Procurement and acceptance of minienvironments, 1995)

A minienvironment which can be removed from the process tool without restricting the tool’s wafer loading/unloading and processing functions. Tools may have provisions for input/output interface, power and interlock communications. (SEMI E44-96, Guide for Procurement and acceptance of minienvironments, 1995)

A unit including a SMIF port and a cassette transfer mechanism. The unit can be removed from the process tool without restricting the tool’s loading/unloading function. (SEMI E44-96, Guide for Procurement and acceptance of minienvironments, 1995)

Organism only viable in the absence of oxygen. (Introduction to Contamination Control and Cleanroom Technology, 1999)

A colloidal system in which the dispersion medium is a gas, i.e. a liquid solution which has been atomized into a fine mist (small droplets). (Introduction to Contamination Control and Cleanroom Technology, 1999)

A value indicating the number of times per hour that the air is changed within a certain room or containment. A very commonly used indicator for conventional cleanroom that purge themselves. (Introduction to Contamination Control and Cleanroom Technology, 1999)

Intermediate room that is normally ventilated. (Introduction to Contamination Control and Cleanroom Technology, 1999)

A method to create a clear air/ gas environment in the minienvironment. (SEMI E44-96, Guide for Procurement and acceptance of minienvironments, 1995)

A value indicating the speed of the air movement in a room. A very commonly used indicator of the ability of a unidirectional-flow cleanroom that purge itself. (Introduction to Contamination Control and Cleanroom Technology, 1999)

Any individual species of algae. (Introduction to Contamination Control and Cleanroom Technology, 1999)

A group of cryptogamic plants in which the body is unicellular. This group includes seaweeds and many unicellular fresh water plants, most of which contain chlorophyll. (Introduction to Contamination Control and Cleanroom Technology, 1999)

Lacking molecular oxygen (Introduction to Contamination Control and Cleanroom Technology, 1999)

Microorganisms that have the ability to grow in the complete or almost complete absence of molecular oxygen. (Introduction to Contamination Control and Cleanroom Technology, 1999)

A substance that will inhibit the growth and development of microorganisms without necessarily destroying them. (Introduction to Contamination Control and Cleanroom Technology, 1999)

The prevention of sepsis by the inhibition or destruction of the causative organisms. (Introduction to Contamination Control and Cleanroom Technology, 1999)

A cleanroom (facility) that is complete and ready for operation, with all services connected and functional, but without equipment or operating personnel in the facility. (Federal Standard, Stuttgart 1991)

Free from infection or septic material. (Introduction to Contamination Control and Cleanroom Technology, 1999)

American Society for Testing and Materials (ECSS-Q-ST-70-05C, 2009)

Attenuated total reflection (ECSS-Q-ST-70-05C, 2009)

A cleanroom (facility) that is complete, with all services functioning and with equipment installed and operable or operating, as specified, but without operating personnel in the facility. (Federal Standard, Stuttgart 1991)

Reflection that occurs when an absorbing coupling mechanism acts in the process of total internal reflection to make the reflectance less than unity. (ECSS-Q-ST-70-05C, 2009)

Absorbance Unit (ECSS-Q-ST-70-05C, 2009)

person with the competence to conduct an audit (International Standard, ISO/FDIS 14001, 2004)

Outgassing rate of the vacuum chamber under normal conditions of operation at a certain mass range and time in the absence of the part to be verified. (ASML-Standards, Cleanliness Grades, Grade 2: Verification RGA, GSA 07 2211,2008)

Main group of microorganisms. (Introduction to Contamination Control and Cleanroom Technology, 1999)

Comparison of a measurement standard or instrument of unknown accuracy (Federal Standard, Stuttgart 1991)

Determination of the accuracy of an invariation from a standard, to a certain necessary correction factor. (Introduction to Contamination Control and Cleanroom Technology, 1999)

Critical Control Point (Introduction to Contamination Control and Cleanroom Technology, 1999)

Clean dry air (SEMI F28-1103, test method for measuring particle generation from process panels, 2003)

Colony Forming Unit (Introduction to Contamination Control and Cleanroom Technology, 1999)

Current Good Manufacturing Practice (Introduction to Contamination Control and Cleanroom Technology, 1999)

Room where people using a cleanroom may change into or out of cleanroom clothing. (Introduction to Contamination Control and Cleanroom Technology, 1999)

Removal of contamination (ASML-Standards, Cleanliness Grades Grade 2: Surface Cleanliness, GSA 07 2310, 2007)

Established level of cleanliness in a given volume, or a given surface. (ASML-Standards, Cleanliness Grades Grade 2: Surface Cleanliness, GSA 07 2310, 2007)

Checking the required cleanliness level. (ASML-Standards, Cleanliness Grades Grade 2: Surface Cleanliness, GSA 07 2310, 2007)

A room in which the concentration of airborne particles is controlled and which contains one or more clean zones. (Federal Standard, Stuttgart 1991)

A defined space in which the concentration of airborne particles is controlled to meet a specified airborne particulate cleanliness. (Federal Standard, Stuttgart 1991)

Condensation nucleaus counter (SEMI E44-96, Guide for Procurement and acceptance of minienvironments, 1995)

A collection or group of microorganisms derived from the proliferation of an isolated single organism or group of organisms. (Introduction to Contamination Control and Cleanroom Technology, 1999)

A chemical agent with the ability to solubilize metal-containing oxides. (Introduction to Contamination Control and Cleanroom Technology, 1999)

An instrument for counting small airborne particles, approximately 0.01 μm and larger, by optically detecting droplets formed by condensation of a vapor upon the particles. (Federal Standard 209D, Stuttgart 1991)

A small plastic dish overfilled with growth medium so that the level of agar rises above the rim of the plate and used for surface sampling of microorganisms. To take a sample on a flat surface the convex agar surface is firmly pressed against the surface using a gentle rocking motion in order to secure complete contact. (Introduction to Contamination Control and Cleanroom Technology, 1999)

Something that contaminates. (Introduction to Contamination Control and Cleanroom Technology, 1999)

To soil, stain and/or infect by contact or association. (Introduction to Contamination Control and Cleanroom Technology, 1999)

Any unwanted matter which could be detrimental to the required operation, reliability, or performance of a part, component, subsystem, or system. (ASML-Standards, Cleanliness Grades Grade 2: Surface Cleanliness, GSA 07 2310, 2007)

Organized action to control the level of (re)contamination during all processes starting after cleaning up to install. (ASML-Standards, Cleanliness Grades Grade 2: Surface Cleanliness, GSA 07 2310, 2007)

action to eliminate the cause of a detected nonconformity (International Standard, ISO/FDIS 14001, 2004)

The stage in the growth curve of microorganisms, when they gradually begin to deteriorate. (Introduction to Contamination Control and Cleanroom Technology, 1999)

The freeing of a person or an object of some contaminating substance such as gas, radioactive material, microorganisms etc. Within the area of contamination control decontamination often refers to the reduction of numbers of living organisms to some lower population level, but not necessarily to zero. (Introduction to Contamination Control and Cleanroom Technology, 1999)

Reflection in which the flux is scattered in many directions by diffusion at or below the surfaces. (ECSS-Q-ST-70-05C, 2009)

An instrument, such as an optical particle counter or a condensation nucleaus counter, capable of resolving responses from individual particles. (Federal Standard 209D, Stuttgart 1991)

An apparatus used for the numerical counting of discrete particles. (Introduction to Contamination Control and Cleanroom Technology, 1999)

dioctylphthalate, synonym (2-ethylhexyl)phthalate (ECSS-Q-ST-70-05C, 2009)

a liquid that can be broken up into particles of minute size, e.g. smoke. (Introduction to Contamination Control and Cleanroom Technology, 1999)

diffuse reflection infrared fourier transform (ECSS-Q-ST-70-05C, 2009)

deuterated triglycine sulphate IR detector (ECSS-Q-ST-70-05C, 2009)

Solid material that can be found on surfaces or suspended in gases. (Introduction to Contamination Control and Cleanroom Technology, 1999)

A physical barrier between the localized environment and the surroundings. (SEMI E44-96, Guide for Procurement and acceptance of minienvironments, 1995)

A plane perpendicular to the unidirectional airflow located immediately upstream of the region. (Federal Standard 209D, Stuttgart 1991)

part of an organization’s management system used to develop and implement its environmental policy and manage its environmental aspects (International Standard, ISO/FDIS 14001, 2004)

Electropolished (SEMI F28-1103, test method for measuring particle generation from process panels, 2003)

expanded polystyrene (SEMI E137-0705, guide for final assembly, packaging, transportation, unpacking and relocation of semiconductor manufacturing equipment, 2004)

electrostatic discharge (ECSS-Q-ST-70-05C, 2009)

Fast fourier transformation (SEMI E44-96, Guide for Procurement and acceptance of minienvironments, 1995)

Failure Mode Effects Analysis. A method of accessing risks. (Introduction to Contamination Control and Cleanroom Technology, 1999)

Mathematical process used to covert an amplitude-time spectrum to an amplitude-frequency spectrum or vice versa. (ECSS-Q-ST-70-05C, 2009)

Failure Tee Analysis. A method for accessing risks. (Introduction to Contamination Control and Cleanroom Technology, 1999)

Fourier transform infrared (sepctrometry) (ECSS-Q-ST-70-05C, 2009)

The time needed to reduce the total number of microorganisms in a certain medium at 121 °C (using an autoclave) (Introduction to Contamination Control and Cleanroom Technology, 1999)

A set of clothing which when worn together provides optimum protection to both wearer and the environment. (Introduction to Contamination Control and Cleanroom Technology, 1999)

Graphite furnace atomic absorption spectroscopy (SEMI E44-96, Guide for Procurement and acceptance of minienvironments, 1995)

Good Laboratory Practice (Introduction to Contamination Control and Cleanroom Technology, 1999)

Good Manufacturing Practice. A series of rules, used to ensure that the product is always produced in the same way with respect to cleanliness, identity, effect and content. (Introduction to Contamination Control and Cleanroom Technology, 1999)

High Efficiency Particulate Air Filter. A HEPA filter is defined as a filter for ventilation air with the ability to reduce the number of particles of 0.3 µm or greater in size in the air by at least 99.97 % as measured with a DOP aerosol. (Introduction to Contamination Control and Cleanroom Technology, 1999)

Institute of Environmental Sciences (ECSS-Q-ST-70-05C, 2009)

Spectroscopy in the infrared region of the electromagnetic spectrum, i.e. with wavelength range from approximately 0.78 µm to 1000 µm (wave number range (12820 cm^-1 to 10  cm^-1) (ECSS-Q-ST-70-05C, 2009)

The minienvironments in an integral part of the tool. (SEMI E44-96, Guide for Procurement and acceptance of minienvironments, 1995)

A unit including SMIF port and a mechanism for indexing the port door. The entire unit being incorporated within the tool. (SEMI E44-96, Guide for Procurement and acceptance of minienvironments, 1995)

systematic, independant and documented process for obtaining audit evidence and evaluating it objectively to determine the extent to which the environmental management system audit criteria set by the organization are fulfilled (International Standard, ISO/FDIS 14001, 2004)

person or group concerned with or affected by the environmental performance of an organization (International Standard, ISO/FDIS 14001, 2004)

isopropyl alcohol (ECSS-Q-ST-70-05C, 2009)

isopropyl alcohol (2-propanol) (SEMI E137-0705, guide for final assembly, packaging, transportation, unpacking and relocation of semiconductor manufacturing equipment, 2004)

Infrared (ECSS-Q-ST-70-05C, 2009)

International Organization for Standardization (ECSS-Q-ST-70-05C, 2009)

A condition of sampling in which the direction of the airflow into the sampling probe inlet is in the same as that of the unidirectional airflow being sampled. (Federal Standard 209D, Stuttgart 1991)

The condition of isoaxial sampling in which the mean velocity of the air entering the probe inlet is the same as the mean velocity of the unidirectional airflow at that location. (Federal Standard 209D, Stuttgart 1991)

International Union of Pure and Applied Chemistry (ECSS-Q-ST-70-05C, 2009)

Laminar Airflow. A theoretical situation where the air is moving in absolutely parallel streams. In practice very hard to achieve. LAF is not used frequently today. A more accurate term to use is UDF (Unidirectional Flow9. (Introduction to Contamination Control and Cleanroom Technology, 1999)

A flow of parallel streams in the same direction. (Introduction to Contamination Control and Cleanroom Technology, 1999)

Laser Current Sensor (SEMI E54.10-0600, Specification for sensor/actuator network specific device model for an in-situ particle monitor device, 2000)

Deadly, fatal (Introduction to Contamination Control and Cleanroom Technology, 1999)

Making a product from raw or semi-finished materials ready for cleaning. (ASML-Standards, Cleanliness Grades Grade 2: Surface Cleanliness, GSA 07 2310, 2007)

mercury cadmium telluride IR detector (ECSS-Q-ST-70-05C, 2009)

A substance used for the culture of microorganisms (Introduction to Contamination Control and Cleanroom Technology, 1999)

Means to transfer cassettes or substrates into/ out of a minienvironment. (SEMI E44-96, Guide for Procurement and acceptance of minienvironments, 1995)

Median Noise Sensor (SEMI E54.10-0600, Specification for sensor/actuator network specific device model for an in-situ particle monitor device, 2000)

Most penetrating particle size (SEMI E44-96, Guide for Procurement and acceptance of minienvironments, 1995)

The routine determination of airborne concentrations, as well as the other relevant conditions, in cleanrooms and clean zones. (Federal Standard 209D, Stuttgart 1991)

Noise criteria

non-fulfilment of a requirement (International Standard, ISO/FDIS 14001, 2004)

Airflow which does not meet the defintion of unidirectional airflow; previously referred to as “turbulent” or “non-laminar” airflow. (Federal Standard 209D, Stuttgart 1991)

non-volatile residue (ECSS-Q-ST-70-05C, 2009)

Original equipment manufacturer (SEMI E44-96, Guide for Procurement and acceptance of minienvironments, 1995)

Airborne optical particle counter (SEMI E44-96, Guide for Procurement and acceptance of minienvironments, 1995)

A cleanroom or facility in normal operation, with all services functioning and with equipment and personnel, if applicable, present and performing their normal work functions in the facility. (Introduction to Contamination Control and Cleanroom Technology, 1999)

Company, corporation, firm, enterprise, authority or institution, or part or combination thereof, whether incorporated or not, public or private, that has its own functions and administration. (International Standard, ISO/FDIS 14001, 2004)

An object of solid or liquid composition, or both, and generally between 0.001 and 1000 µm in size. (Federal Standard 209D, Stuttgart 1991)

The number of individual particles per unit volume of air. (Federal Standard 209D, Stuttgart 1991)

The apparent maximum linear dimension of a particle in the plane of observation as seen with a microscope, or the equivalent diameter of a particle detected by automatic instrumentation. The equivalent diameter is the diameter of a reference sphere having known properties and producing the same responses in the sensing instrument as the particle being measured. (Federal Standard 209D, Stuttgart 1991)

Any disease producing microorganism or material. (Introduction to Contamination Control and Cleanroom Technology, 1999)

A simple way of expressing a clothing system for cleanroom use. (Introduction to Contamination Control and Cleanroom Technology, 1999)

purchase order (SEMI E137-0705, guide for final assembly, packaging, transportation, unpacking and relocation of semiconductor manufacturing equipment, 2004)

Point of connection (SEMI F42-0600, test mtehod for semiconductor processing equipment voltage sag immunity, 1999)

A box having a Standard Mechanical Interface (SMIF). (SEMI E44-96, Guide for Procurement and acceptance of minienvironments, 1995)

The point where a particular activity is carried out. Typically the final filter of a ventilation system is point of use, i.e. the filter is an integrated part of the roof. (Introduction to Contamination Control and Cleanroom Technology, 1999)

Ventilation pattern where a positive flow of air or other gas is used to purge the room or zone of containments. (Introduction to Contamination Control and Cleanroom Technology, 1999)

A filter unit positioned in front of any other filter, used to reduce blockage of the main filter caused by containments. The pre-filter has in general a lower removal rating than the main filter. (Introduction to Contamination Control and Cleanroom Technology, 1999)

use of processes, practices, techniques, materials, products, services or energy to avoid, reduce or control (separately or in combination) the creation, emission or discharge of any type of pollutant or waste, in order to reduce adverse environmental impacts (International Standard, ISO/FDIS 14001, 2004)

action to eliminate the cause of a potential nonconformity (International Standard, ISO/FDIS 14001, 2004)

specified way to carry out an activity or a process (International Standard, ISO/FDIS 14001, 2004)

Polytetrafluoroethylene (ECSS-Q-ST-70-05C, 2009)

Particles per wafer pass (SEMI E44-96, Guide for Procurement and acceptance of minienvironments, 1995)

quartz crystal microbalance (ECSS-Q-ST-70-05C, 2009)

Reuter Centrifugal Sampler (Introduction to Contamination Control and Cleanroom Technology, 1999)

A form of contact plate. (Introduction to Contamination Control and Cleanroom Technology, 1999)

refractive index (ECSS-Q-ST-70-05C, 2009)

Recommended Practices, a series of documents published by the Institute of Environmental Sciences and Technologies (IEST) USA. (Introduction to Contamination Control and Cleanroom Technology, 1999)

Diameter of the infrared beam at the window location (ECSS-Q-ST-70-05C, 2009)

An impaction sampler for microbial analysis in which airborne particles are collected onto a slowly rotating agar plate making it possible to obtain the microbiological profile of a facility as a function of time. The impact forces in such an apparatus are obtained by allowing the air to be analysed to pass through a very fine slit. (Introduction to Contamination Control and Cleanroom Technology, 1999)

Stray Light Sensor (SEMI E54.10-0600, Specification for sensor/actuator network specific device model for an in-situ particle monitor device, 2000)

Standard mechanical interface (SEMI E44-96, Guide for Procurement and acceptance of minienvironments, 1995)

signal or noise ratio (ECSS-Q-ST-70-05C, 2009)

Bench that is used when changing cleanroom clothing and which provides a barrier to the spread of floor contamination. (Introduction to Contamination Control and Cleanroom Technology, 1999)

Cleanliness defintion (Introduction to Contamination Control and Cleanroom Technology, 1999)

Any process or activity leading to the complete elimination of microbial activity. (Introduction to Contamination Control and Cleanroom Technology, 1999)

Surfactant. An agent, both hydrophobic as well as hydrophilic in nature. Used for cleaning purposes as it can be used to dissolve fats and make them water-soluble. (Introduction to Contamination Control and Cleanroom Technology, 1999)

Total organic carbon (SEMI E137-0705, guide for final assembly, packaging, transportation, unpacking and relocation of semiconductor manufacturing equipment, 2004)

Total reflection x-ray fluorescence spectroscopy (SEMI E44-96, Guide for Procurement and acceptance of minienvironments, 1995)

The maximum allowable concentration (particles per cubic meter of air) of ultrafine particles. The U descriptor serves as an upper confidence limit or as the upper limit for the location averages, or both, as appropriate, U descriptors are independent of airborne particulates cleanliness classes, and may be specified alone or in conjunction with one or more airborne particulate cleanliness classes. (Federal Standard 209D, Stuttgart 1991)

Unidirectional Flow. New term replacing LAF. UDF is an airflow which has a single flow direction and may or may not contain uniform velocities of airflow. UDF results in quick, directed transport of particles out of the clean zone. (Introduction to Contamination Control and Cleanroom Technology, 1999)

Ultra Low Penetrating Air Filter. An ULPA filter is defined as a filter for ventilation air with the ability to reduce the number of particles in the air of size 0.12 µm and greater, by at least 99.999 % as measured with DOP aerosol. (Introduction to Contamination Control and Cleanroom Technology, 1999)

Particles in the size range from approximately 0.02 µm to the upper limit of detecability of the DPC described in Appendix D. Ultrafine particles are operationally defined by the relationship for counting efficiency vs. particle size of Appendix D. (Federal Standard 209D, Stuttgart 1991)

Particles in the size range from approximately 0.01 µm to the upper detection limit of the DPC. (Introduction to Contamination Control and Cleanroom Technology, 1999)

Airflow having generally parallel streamlines, operating in a single direction, and with uniform velocity over its cross section; previously referred to as “laminar” airflow. (Federal Standard 209D, Stuttgart 1991)

An upper limit of the estimated mean which has been calculated so that, in a specified percentage of cases, its value exceeds the true population mean, both means having been sampled from a normal (Gaussian) distribution. In this Stndard, a 95 % UCL is used. (Federal Standard 209D, Stuttgart 1991)

Ultrapure water (SEMI E137-0705, guide for final assembly, packaging, transportation, unpacking and relocation of semiconductor manufacturing equipment, 2004)

ultraviolet (ECSS-Q-ST-70-05C, 2009)

Full and detailed documentation that all processes and procedures are functioning in the manner for which they were designed. (Introduction to Contamination Control and Cleanroom Technology, 1999)

Vibration classification (VC-A – VC-E) (SEMI E44-96, Guide for Procurement and acceptance of minienvironments, 1995)

volatile condensable material (ECSS-Q-ST-70-05C, 2009)

The procedure for determining the compliance of air in a cleanroom or clean zone to an airborne particulate cleanliness class limit or a U descriptor, or both, as specified. (Federal Standard 209D, Stuttgart 1991)

Vapor phase decompostion (SEMI E44-96, Guide for Procurement and acceptance of minienvironments, 1995)